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ISBN-10: 0080577148

ISBN-13: 9780080577142

ISBN-10: 0120146495

ISBN-13: 9780120146499

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SVITASHEV _.. 5. The rule for reading the azimuth angles yA, yp, yc. x1 is the direction of the polanzet and analyzer transmission or the L‘fast”axis of a compensator. angles of the polarizer, analyzer, and compensator (see Fig. 5), these matrices have the following form : (1) An ideal linear polarizer (analyzer) : ‘ 1 cos 2yp cos 2yp cos2 2yp WYP) = 4 sin 27, sin 2yp 0- sin 2yp cos 2yp 0 sin 2yp cos 2yp sin2 2yp 0 0 0 0. o where yp is the angle between the s direction and “transmission” direction of the polarizer.

19. Change of the polarizing angles and A during the growth of oxide film on an etched germanium surface in air. 0656 AJmin. As is evident from the foregoing examples, the accuracy of ellipsometric measurements of the thickness and refractive index of thin transparent films is very high. However, it is necessary to emphasize the appreciable difference between the accuracy in measuring the increase of the film parameters and in measuring the absolute values of these parameters. In the works by Jerrard (1969a), Matheson et al.

Quite a number of interesting modifications of the considered method of automating ellipsometric measurements are suggested by Aspnes and Hauge (19761 Hauge and Dill (1973, 1975), Hauge (1976), Jasperson and Schnatterly (1969), Jasperson et al. (1973), and Treu et al. (1973). These modifications are connected with compensator rotation and the simultaneous rotation of a compensator and an analyzer, as well as with the phase modulation of the operating light beam when using electrooptical and photoelastic effects in a compensator or in a special additional plate of a birefringent material.

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Advances in Electronics and Electron Phisics. Vol. 49 by Author Unknown


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